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EBARA Ebara Technologies
- 151 Main Avenue, Sacramento, CA 95838, USA

email, Tel.
products: Dry vacuum pumps

EBARA is a world leader in the design and manufacture of dry mechanical pumps. EBARA dry pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership. EBARA's dry pumps survive the harshest applications such as LPCVD, PECVD, CVD, and metal etch. EBARA's dry pumps are used for many applications in and outside the semiconductor industry where oil backstreaming is unacceptable. EBARA has manufacturing facilities in Sacramento, Ca and Fujisawa, Japan.


KASHIYAMA dry vacuum pump KASHIYAMA USA, Inc.
3350 Scott Boulevard #6101, Santa Clara, CA 95054, USA

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Vacuum Pump Sales, Customer Support, Service.
products: Dry vacuum pumps


MD-KINNEY dry vacuum pump MD-KINNEY
- IRCO, USA

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products: Dry vacuum pumps
  • KDP Fixed Pitch Screw-type dry vacuum pump designed to handle process by-products.
  • SDV Screw-type dry vacuum pump with patented variable pitch rotor design commonly used in chemical and pharmaceutical processing.


Pfeiffer Vacuum Dry vacuum pumps Pfeiffer Vacuum Inc. -
- 24 Trafalgar Square, Nashua NH 03063-1988, USA

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Our comprehensive range of solutions, products and services includes vacuum pumps, measurement and analysis equipment, up to complex vacuum systems.
products: Dry vacuum pumps


TOYOTA dry vacuum pump TOYOTA Industries Corporation
- 44901 Industrial Drive, Fremont, CA 94538, USA

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Toyota Industries Corporation manufactures and sells high quality and reliable dry vacuum pumps using the technology cultivated in the development and production of car air-conditioning compressors.
products: Dry vacuum pumps

EC 100L and T Series use a multistage roots system.
These dry pumps mainly used in semiconductor production equipment, have achieved best-in-class low power consumption and contributed to the reduction of electricity consumption and CO2 emissions.

  • T100L (100m3/h down to 0,01 Torr) is an ultra compact and quiet roots dry pump for clean application. It is designed for the integration into semiconductor equipment in the cleanroom.
  • T100P (100m3/h down to 0,01 Torr) is excellent performance dry pump for all process including light duty and harsh duty processes. It has good reliability and safety for reactive gases and deposition.
  • T1000 (600-950m3/h down to 0,001 Torr) is designed to cover wide range of processes with its high capacity and variable pumping speed. It has good reliability and safety for reactive gases and deposition.

 

 

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